JAVAC has released a range of vacuum pumps with modular design.
The pumps can be used in atmospheric pressures from 10 mb to 2 mb, and operating pressures from 10 mb to 7 mb can be reached through connection with a high-vacuum stage.
The vacuum pump includes a cantilevered bearing arrangement, with monitoring through SP Guard.
The product does not require purge gas or cooling water for standard applications, with no contaminated waste oil.
The pump requires only one annual change of gear oil, and is capable of 2000 m3/h pumping speed.
Connections are provided through universal flanges, with accessories available for custom requirements.
The product is suitable for short cycles of load-lock chambers, or similar applications.